Find graphs of atom probe profile of a low energy implantation, and compare with other methods of characterisations (e.g. SIMS).

Look for mass spectra and ranging, in partictular, the ranging of very small peaks.

Look for details of how people have made AP samples to look at these sort of implantations, including numbers of Focussed Ion Beam parameters (distances, energies etc for milling out samples) and pictures showing that samples at various stages of fabrication.

Try to find data from a wide range of dates to get an idea how when key things happened in terms of analysis.